Technology path-finding framework for directed-self assembly for via layers
Badr, Yasmine, Gupta, PuneetVolume:
16
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.16.1.013505
Date:
March, 2017
File:
PDF, 1.43 MB
english, 2017