SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - The planar silicon-based microelectronic technology for electrochemical transducers
Lukichev, Vladimir F., Rudenko, Konstantin V., Novikov, A. V., Egorchikov, A. E., Dolgov, A. N., Gornev, E. S., Popov, V. G., Egorov, I. V., Krishtop, V. G.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2267095
File:
PDF, 722 KB
english, 2016