Effect of energy density on the target on SnO2:Sb film...

Semiconductors 2017 / 3 Vol. 51; Iss. 3

Effect of energy density on the target on SnO2:Sb film properties when using a high-speed particle separator

Parshina, L. S., Khramova, O. D., Novodvorsky, O. A., Lotin, A. A., Petukhov, I. A., Putilin, F. N., Shcherbachev, K. D.
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Volume:
51
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782617030228
Date:
March, 2017
File:
PDF, 262 KB
english, 2017
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