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Deflection of circular diaphragm-type piezoactuators coupling with gas compression in micropumps
Hu, Yuanlin, Liang, Xin, Wang, WenLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3355-3
Date:
March, 2017
File:
PDF, 6.35 MB
english, 2017