A simple fabrication process for disposable interdigitated...

Microelectronic Engineering 2017 / 04 Vol. 173

A simple fabrication process for disposable interdigitated electrode arrays with nanogaps for lab-on-a-chip applications

Partel, S., Kasemann, S., Matylitskaya, V., Thanner, C., Dincer, C., Urban, G.
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Volume:
173
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.03.014
Date:
April, 2017
File:
PDF, 1.25 MB
english, 2017
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