Microstructure and mechanical properties of sputter...

Thin Solid Films 2017 / 05 Vol. 629

Microstructure and mechanical properties of sputter deposited tantalum nitride thin films after high temperature loading

Grosser, Michaela, Seidel, Helmut, Schmid, Ulrich
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Volume:
629
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.03.030
Date:
May, 2017
File:
PDF, 2.31 MB
english, 2017
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