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Work function engineering in silicides: Chlorine doping in NiSi
Slepko, Alexander, Demkov, Alexander A., Loh, W.-Y., Majhi, P., Bersuker, G.Volume:
109
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3573481
Date:
April, 2011
File:
PDF, 3.29 MB
english, 2011