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Use of a buried loop layer as a detector of interstitial flux during oxidation of SiGe heterostructures
Martin, Thomas P., Aldridge, Henry L., Jones, K. S., Camillo-Castillo, Renata A.Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4972516
Date:
March, 2017
File:
PDF, 796 KB
english, 2017