![](/img/cover-not-exists.png)
Microwave discharge plasma production with resonant cavity for EUV mask inspection tool
Tashima, Saya, Ohnishi, Masami, Hugrass, Waheed, Sugimoto, Keita, Sakaguchi, Masatugu, Osawa, Hodaka, Nishimura, Hiroaki, Matsukuma, HirakuVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.126701
Date:
December, 2015
File:
PDF, 1.22 MB
english, 2015