Electron-beam-induced-current and active secondary-electron...

Ultramicroscopy 2017 / 05 Vol. 176

Electron-beam-induced-current and active secondary-electron voltage-contrast with aberration-corrected electron probes

Han, Myung-Geun, Garlow, Joseph A., Marshall, Matthew S.J., Tiano, Amanda L., Wong, Stanislaus S., Cheong, Sang-Wook, Walker, Frederick J., Ahn, Charles H., Zhu, Yimei
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Volume:
176
Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2017.03.028
Date:
May, 2017
File:
PDF, 2.89 MB
english, 2017
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