Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 11 Vol. 33; Iss. 6
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Stereolithography with variable resolutions using optical filter with high-contrast gratings
Li, Yuanrui, Mao, Huachao, Liu, He, Yao, Yuhan, Wang, Yifei, Song, Boxiang, Chen, Yong, Wu, WeiVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4935336
Date:
November, 2015
File:
PDF, 1.40 MB
english, 2015