SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Design-Process-Technology Co-optimization for Manufacturability XI - Design intent optimization at the beyond 7nm node: the intersection of DTCO and EUVL stochastic mitigation techniques

Capodieci, Luigi, Cain, Jason P., Crouse, Michael, Liebmann, Lars, Plachecki, Vince, Salama, Mohamed, Chen, Yulu, Saulnier, Nicole, Dunn, Derren, Matthew, Itty, Hsu, Stephen, Gronlund, Keith, Goodwin,
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Volume:
10148
Year:
2017
Language:
english
DOI:
10.1117/12.2260865
File:
PDF, 1.12 MB
english, 2017
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