SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Optical Microlithography XXX - Decomposition of the TCC using non-coherent kernels for faster calculation of lithographic images

Erdmann, Andreas, Kye, Jongwook, Rosenbluth, Alan E.
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Volume:
10147
Year:
2017
Language:
english
DOI:
10.1117/12.2261223
File:
PDF, 2.65 MB
english, 2017
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