Two-dimensional spin coating technology and the effect of...

Microsystem Technologies 2017 / 5 Vol. 23; Iss. 5

Two-dimensional spin coating technology and the effect of artificial gravity on film’s air-bubbling

Mahmoodi, Soroosh, Guoqing, Hu, Wang, Lingyun, Nourikhajavi, Mehrdad
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3275-2
Date:
May, 2017
File:
PDF, 2.93 MB
english, 2017
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