Si (100) and (110) etching properties in 5, 15, 30 and 48...

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Microsystem Technologies 2017 / 3

Si (100) and (110) etching properties in 5, 15, 30 and 48 wt%KOH aqueous solution containing Triton-X-100

Tanaka, Hiroshi, Takeda, Masato, Sato, Kazuo
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3368-y
Date:
March, 2017
File:
PDF, 2.77 MB
english, 2017
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