Influence of N2flow rate on structure and properties of...

Nuclear Science and Techniques 2017 / 5 Vol. 28; Iss. 5

Influence of N2flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

Han, Bin, Wang, Ze-Song, Neena, D., Lin, Bao-Zhu, Yang, Bing, Liu, Chuan-Sheng, Fu, De-Jun
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Volume:
28
Language:
english
Journal:
Nuclear Science and Techniques
DOI:
10.1007/s41365-017-0212-0
Date:
May, 2017
File:
PDF, 2.44 MB
english, 2017
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