Investigation of optical knife edge sensor for low-cost,...

Measurement 2017 / 06 Vol. 103

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

Lee, ChaBum, Jeon, Seongkyul, Stepanick, Christopher K., Zolfaghari, Abolfazl, Tarbutton, Joshua A.
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Volume:
103
Language:
english
Journal:
Measurement
DOI:
10.1016/j.measurement.2017.02.030
Date:
June, 2017
File:
PDF, 2.13 MB
english, 2017
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