Smoothening of scalloped DRIE trench walls

Materials Science in Semiconductor Processing 2017 / 06 Vol. 63

Smoothening of scalloped DRIE trench walls

Syed Mohammed, Zishan Ali, Olimpo, M.A.S., Poenar, D.P., Aditya, S.
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Volume:
63
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.02.006
Date:
June, 2017
File:
PDF, 1.03 MB
english, 2017
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