Fabrication of High-aspect-ratio Microstructures for...

Physics Procedia 2017 Vol. 86

Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer

Derevyanko, D.I., Shelkovnikov, V.V., Orlova, N.A., Goldenberg, B.G., Lemzyakov, A.G., Korolkov, V.P.

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Volume:

Year:

2017

Language:

english

Journal:

Physics Procedia

DOI:

10.1016/j.phpro.2017.01.032

File:

PDF, 6.56 MB

english, 2017

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