![](/img/cover-not-exists.png)
Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer
Derevyanko, D.I., Shelkovnikov, V.V., Orlova, N.A., Goldenberg, B.G., Lemzyakov, A.G., Korolkov, V.P.Volume:
86
Year:
2017
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2017.01.032
File:
PDF, 6.56 MB
english, 2017