A Partially Wettable Micromechanical Resonator for Chemical- and Biosensing in Solution
Peiker, Phil, Klingel, Steffen, Menges, Julian, Bart, Hans-Jörg, Oesterschulze, EgbertVolume:
168
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2016.11.225
File:
PDF, 624 KB
english, 2016