Mask-Less Direct-Writing Deposition of Lead-Free Piezoelectric Films for Microsystems
Ferrari, Marco, Dalola, Simone, Ferrari, Vittorio, Cordaro, Giulio, Cristiani, Cinzia, Dotelli, GiovanniVolume:
168
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2016.11.409
File:
PDF, 593 KB
english, 2016