Low vacuum MEMS Ion-sorption Micropump

Procedia Engineering 2016 Vol. 168

Low vacuum MEMS Ion-sorption Micropump

Grzebyk, Tomasz, Górecka-Drzazga, Anna, Dziuban, Jan A.
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Volume:
168
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2016.11.468
File:
PDF, 579 KB
english, 2016
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