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Electromechanical Coupling between Comb-Drive Actuators and Charge Pump Converters
Verdin, B., Le Moal, P., Bourbon, G., Walter, V.Volume:
168
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2016.11.486
File:
PDF, 442 KB
english, 2016