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Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems
K. Maßeli, J. Burbach, R. Kassing, W. Kulisch, L. NiewöhnerVolume:
91
Year:
1987
Language:
english
Pages:
7
DOI:
10.1007/bf01199510
File:
PDF, 340 KB
english, 1987