Formation mechanisms of Si 3 N 4 and Si 2 N 2 O in silicon...

Solid State Sciences 2017 / 04 Vol. 66

Formation mechanisms of Si 3 N 4 and Si 2 N 2 O in silicon powder nitridation

Yao, Guisheng, Li, Yong, Jiang, Peng, Jin, Xiuming, Long, Menglong, Qin, Haixia, Kumar, R. Vasant
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Volume:
66
Language:
english
Journal:
Solid State Sciences
DOI:
10.1016/j.solidstatesciences.2017.03.002
Date:
April, 2017
File:
PDF, 1.86 MB
english, 2017
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