Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas
Nishida, K., Mattei, S., Mochizuki, S., Lettry, J., Hatayama, A.Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4953647
Date:
June, 2016
File:
PDF, 1.78 MB
english, 2016