![](/img/cover-not-exists.png)
Ion-beam induced atomic mixing in isotopically controlled silicon multilayers
Radek, M., Bracht, H., Liedke, B., Böttger, R., Posselt, M.Volume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4967317
Date:
November, 2016
File:
PDF, 2.28 MB
english, 2016