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Stress originating from nanovoids in hydrogenated amorphous semiconductors
Wang, Zumin, Flötotto, David, Mittemeijer, Eric J.Volume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4977853
Date:
March, 2017
File:
PDF, 1.24 MB
english, 2017