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[IEEE 2016 17th International Conference on Electronic Packaging Technology (ICEPT) - Wuhan, China (2016.8.16-2016.8.19)] 2016 17th International Conference on Electronic Packaging Technology (ICEPT) - Dynamic stiffness analysis of repetitive control and applied to Advanced Metrology Analyzer
Yao, Wu-Sung, Hu, Ian, Kao, Golden, Shih, Mengkai, Chen, KarenYear:
2016
Language:
english
DOI:
10.1109/icept.2016.7583340
File:
PDF, 1.11 MB
english, 2016