Direct growth of thick AlN layers on nanopatterned Si...

physica status solidi (a) 2017 / 04 Vol. 214; Iss. 4

Direct growth of thick AlN layers on nanopatterned Si substrates by cantilever epitaxy

Demir, İlkay, Robin, Yoann, McClintock, Ryan, Elagoz, Sezai, Zekentes, Konstantinos, Razeghi, Manijeh
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Volume:
214
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201770120
Date:
April, 2017
File:
PDF, 878 KB
2017
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