Modeling of plasma transport and negative ion extraction in a magnetized radio-frequency plasma source
Fubiani, G, Garrigues, L, Hagelaar, G, Kohen, N, Boeuf, J PVolume:
19
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/19/1/015002
Date:
January, 2017
File:
PDF, 3.94 MB
english, 2017