Scattering effects of glass-embedded microstructures by roughness controlled fs-laser micromachining
Lo Turco, Sara, Di Donato, Andrea, Criante, LuiginoVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa6b3b
Date:
June, 2017
File:
PDF, 995 KB
english, 2017