Effects of second-phase particles and elemental...

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Effects of second-phase particles and elemental distributions of ITO targets on the properties of deposited ITO films

Mei, Fangsheng, Yuan, Tiechui, Li, Ruidi
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Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2017.04.021
Date:
April, 2017
File:
PDF, 2.58 MB
english, 2017
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