Effect of Ar + ion assist on the properties of a-C:H films...

Thin Solid Films 2017 / 06 Vol. 631

Effect of Ar + ion assist on the properties of a-C:H films deposited on a trench

Hirata, Yuki, Onishi, Koeki, Choi, Junho
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Volume:
631
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.04.011
Date:
June, 2017
File:
PDF, 2.21 MB
english, 2017
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