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Journal of Microelectromechanical Systems 2017

A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors

Nasr Esfahani, Mohammad, Leblebici, Yusuf, Alaca, B. Erdem
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Year:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2679219
File:
PDF, 4.69 MB
english, 2017
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