Ultrasonic Assisted Mist Chemical Vapor Deposition...

Ultrasonic Assisted Mist Chemical Vapor Deposition Deposited MgO for AlGaNGaN Metal-Insulator-Semiconductor Ultraviolet Photodetector

Liu, Han-Yin, Lee, Ching-Sung, Liu, Guan-Jyun, Huang, Ruei-Chin
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Volume:
1
Language:
english
Journal:
IEEE Sensors Letters
DOI:
10.1109/lsens.2017.2692238
Date:
April, 2017
File:
PDF, 476 KB
english, 2017
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