Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
Sampson, Matthew D., Emery, Jonathan D., Pellin, Michael J., Martinson, Alex B. F.Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b01410
Date:
April, 2017
File:
PDF, 5.98 MB
english, 2017