Combined Macro/Nanoscale Investigation of the Chemical...

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Combined Macro/Nanoscale Investigation of the Chemical Vapor Deposition of Fe from Fe(CO) 5

Aviziotis, Ioannis G., Duguet, Thomas, Vahlas, Constantin, Boudouvis, Andreas G.
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Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201601185
Date:
April, 2017
File:
PDF, 2.92 MB
english, 2017
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