Capacitive displacement sensor for detecting planar...

Review of Scientific Instruments 2016 / 06 Vol. 87; Iss. 6

Capacitive displacement sensor for detecting planar submicrometer motion

Avramov-Zamurovic, Svetlana, Yoo, Jae Myung, Dagalakis, Nicholas G.
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Volume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4952585
Date:
June, 2016
File:
PDF, 5.42 MB
english, 2016
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