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MEMS cantilever based magnetic field gradient sensor
Dabsch, Alexander, Rosenberg, Christoph, Stifter, Michael, Keplinger, FranzVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa654f
Date:
May, 2017
File:
PDF, 3.09 MB
english, 2017