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Influence of surface processing in a BCl3plasma on the formation of ohmic contacts to AlGaN/GaN structures
Andrianov, N. A., Kobelev, A. A., Smirnov, A. S., Barsukov, Yu. V., Zhukov, Yu. M.Volume:
62
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784217030033
Date:
March, 2017
File:
PDF, 758 KB
english, 2017