Enhanced Operation of Back-Channel-Etched a-IGZO TFTs by Fluorine Treatment during Source/Drain Wet-Etching
Park, Young Chul, Um, Jae Gwang, Mativenga, Mallory, Jang, JinVolume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0201705jss
File:
PDF, 1.04 MB
english, 2017