Improvement on the electrical characteristics of Pd/HfO 2 /6H-SiC MIS capacitors using post deposition annealing and post metallization annealing
Esakky, Papanasam, Kailath, Binsu JVolume:
413
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.04.039
Date:
August, 2017
File:
PDF, 1015 KB
english, 2017