Near Vacuum Gas Damping in MEMS: Simplified Modeling

Fedeli, Patrick, Frangi, Attilio, Laghi, Giacomo, Langfelder, Giacomo, Gattere, Gabriele

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Year:

2017

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/JMEMS.2017.2686650

File:

PDF, 5.63 MB

english, 2017

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