SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Integral planar supercapacitor with CNT-based composite electrodes for heat-sensitive MEMS and NEMS
Lukichev, Vladimir F., Rudenko, Konstantin V., Lebedev, E., Alekseyev, A., Gavrilin, I., Sysa, A., Kitsyuk, E., Ryazanov, R., Gromov, D.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2267079
File:
PDF, 910 KB
english, 2016