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Lifetime improvement in silicon wafers using weak magnetic fields
Kuryliuk, A., Steblenko, L., Nadtochiy, A., Korotchenkov, O.Volume:
66
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.03.032
Date:
August, 2017
File:
PDF, 734 KB
english, 2017