Effect of material of the crucible on operation of...

Vacuum 2017 / 07 Vol. 141

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Yuryeva, Alena V., Shabunin, Artyom S., Korzhenko, Dmitry V., Korneva, Olga S., Nikolaev, Mikhail V.
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Volume:
141
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.04.001
Date:
July, 2017
File:
PDF, 778 KB
english, 2017
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