Synthesis and properties of CS x...

Journal of Physics Condensed Matter 2017 / 05 Vol. 29; Iss. 19

Synthesis and properties of CS x F y thin films deposited by reactive magnetron sputtering in an Ar/SF 6 discharge

Lai, Chung-Chuan, Goyenola, Cecilia, Broitman, Esteban, Näslund, Lars-Åke, Högberg, Hans, Hultman, Lars, Gueorguiev, Gueorgui K, Rosen, Johanna
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Volume:
29
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/1361-648X/aa67d2
Date:
May, 2017
File:
PDF, 1.28 MB
english, 2017
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