Fabrication of Hybrid Soft-Nanoimprint Stamp with Sub-100...

Journal of Nanoscience and Nanotechnology 2016 / 12 Vol. 16; Iss. 12

Fabrication of Hybrid Soft-Nanoimprint Stamp with Sub-100 nm Resolution Based on Thiol-Ene

Zhang, Man, Deng, Qiling, Shi, Lifang, Pang, Hui, Cao, Axiu, Hu, Song
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Volume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12970
Date:
December, 2016
File:
PDF, 6.23 MB
english, 2016
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