[IEEE 6th International Conference on Solid-State and IC...

[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Structural and electrical properties of CeO/sub 2//Si with nitrided interfacial layer by nitrogen ion beam bombardment

Jinfeng Kang,, Xiaoyan Liu,, Ruqi Han,, Yangyuan Wang,, Lian, G.J., Kun Xun,, Yu, D.P., Xiong, G.C., Wu, S.C., Wang, Y.G.

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Volume:

Year:

2001

Language:

english

DOI:

10.1109/icsict.2001.981485

File:

PDF, 249 KB

english, 2001

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